1500PW POU Plasma Wet Gas Scrubber

Point-of-use plasma and wet-treatment equipment for specified process exhaust near a research or production tool.

The 1500PW combines a plasma reaction stage with downstream wet gas contact. It is a point-of-use option for suitable semiconductor, photovoltaic or related process exhaust, not a general replacement for every laboratory fume-hood scrubber. The engineering team must confirm the actual gas stream, reaction products and utility capacity before selection.

Process and inlet definition

Record the gases, by-products, powder loading, peak and normal flow, inlet pressure and operating states of the connected tool. Confirm that the plasma-wet process is suitable for those compounds and that downstream liquid handling can manage the resulting products.

Utilities and controls

Coordinate electrical supply, cooling or water services, compressed gas, exhaust suction, drainage and control signals with the facility. Define shutdown and alarm behavior before commissioning. The source catalog values below are selection references, not a site performance certificate.

Catalog selection data

Catalog model 1500PW
Catalog capacity options 500 / 1500 / 3000 SLM; confirm selected variant
Rated electrical reference 208/380 VAC, three-phase, 50/60 Hz; 25 kW in source data
Illustrative cabinet envelope 1,440 W × 1,300 D × 2,000 H mm; confirm drawing
Inlet reference Six NW50 KF-flange intakes in source data

Catalog values are selection references. Confirm the supplied variant, dimensional drawing, compatible gas list, site utilities and acceptance criteria before ordering.

What to send for a quotation

Send tool exhaust composition, normal and peak SLM, utility schedule, available floor space, exhaust connection and required control signals. Contact LGF for a project review.

Explore the Laboratory Gas Scrubber category or read our laboratory exhaust treatment and purge system guidance.