1500HW Electric-Heated Gas Scrubber System

Electric-heated process exhaust treatment with downstream washing for gas streams that require a reviewed thermal and wet-treatment sequence.

The 1500HW reference combines an electrically heated treatment stage with downstream wet handling. It may be considered for specified deposition or specialty-gas process exhaust after a gas-by-gas engineering review. Heat input, reaction products, cooling, drain management and compatible construction all affect the final design.

Define the thermal duty

Supply the gas list, concentration, carrier flow, peak loading and operating pattern. The selected operating temperature and residence time must be established for the actual chemistry and treatment objective. Do not rely on a broad catalog efficiency figure for a site-specific guarantee.

Plan utilities and maintenance

The cabinet requires a coordinated electrical, exhaust, water or cooling, purge and drainage plan. Review access to the treatment chamber and downstream wash section, as well as alarms and safe shutdown. A commissioning plan should verify the installed configuration against the approved specification.

Catalog selection data

Catalog model 1500HW
Catalog application reference CVD / ALD facility exhaust
Rated electrical reference 208/380 VAC, three-phase, 50/60 Hz
Illustrative cabinet envelope 1,440 W × 800 D × 2,100 H mm; confirm drawing
Air intake reference Four air intakes in source data

Catalog values are selection references. Confirm the supplied variant, dimensional drawing, compatible gas list, site utilities and acceptance criteria before ordering.

What to send for a quotation

Send process gas composition, exhaust flow and temperature, duty cycle, utilities, discharge criteria and maintenance constraints. Contact LGF for a project review.

Explore the Laboratory Gas Scrubber category or read our laboratory exhaust treatment and purge system guidance.